ALEXANDRIA, Va., Aug. 26 -- United States Patent no. 12,398,152, issued on Aug. 26, was assigned to LINTFIELD Ltd. (Tonbridge, Great Britain) and Tokyo Electron Ltd. (Tokyo).
"Thioxanthone derivatives, composition comprising the same and pattern forming method comprising said composition" was invented by Christopher Wall (Tonbridge, Great Britain) and Seiji Nagahara (Tokyo).
According to the abstract* released by the U.S. Patent & Trademark Office: "Latent photoinitiator compounds are described, as well as compositions containing such compounds and their uses in photoinitiated methods for producing photoresist structures."
The patent was filed on July 18, 2019, under Application No. 17/261,267.
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