US Patent Issued to Linde, Penta Pro Materials on Sept. 9 for "Systems and processes for production of trisilylamine" (Taiwanese, American, British Inventors)

ALEXANDRIA, Va., Sept. 10 -- United States Patent no. 12,410,056, issued on Sept. 9, was assigned to Linde GmbH (Pullach, Germany) and Penta Pro Materials Inc. (Taipei, Taiwan).

"Systems and processes for production of trisilylamine" was invented by Ce Ma (Apex, N.C.), Atul Athalye (San Marcos, Calif.), Carl Jackson (Thornton-Cleveleys Lancs, Great Britain), Kuochou Yeh (Hsinchu, Taiwan), Wen Che Kuo (Taipei, Taiwan) and Ying Chieh Hu (Tainan, Taiwan).

According to the abstract* released by the U.S. Patent & Trademark Office: "Systems and processes for gas phase-phase synthesis of trisilylamine. One system includes a reactor vessel having a top, bottom, and sidewall having an inner surface. The reactor vessel includes inlets for gaseous r...