ALEXANDRIA, Va., Sept. 10 -- United States Patent no. 12,410,517, issued on Sept. 9, was assigned to Lam Research Corp. (Fremont, Calif.).
"Divertless gas-dosing" was invented by John Folden Stumpf (Portland, Ore.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Various embodiments include systems and apparatuses for divertless dosing of process gases, including divertless dosing of precursor gases in deposition systems. In one example, the disclosed subject matter is a divertless, pressure-based gas-dosing system that includes a process gas inlet coupled to an inlet valve, a flow controller coupled to be downstream of the inlet valve, and a line charge-volume (LCV) coupled to be downstream of the inlet valve ...