ALEXANDRIA, Va., Sept. 10 -- United States Patent no. 12,410,521, issued on Sept. 9, was assigned to Lam Research Corp. (Fremont, Calif.).
"Bidirectional indexing apparatus" was invented by Adriana Vintila (Wilsonville, Ore.) and Matthew Scott Mudrow (Tigard, Ore.).
According to the abstract* released by the U.S. Patent & Trademark Office: "In an example embodiment, a bidirectional indexing apparatus includes a plurality of bidirectional indexing heads that can operate independently of each other or in concert to adjust a gap between a substrate and a pedestal in a substrate processing chamber. In some embodiments, a bidirectional indexing head comprises a base; a rotatable plate rotatable relative to the base, the rotatable plate includi...