ALEXANDRIA, Va., Sept. 10 -- United States Patent no. 12,410,519, issued on Sept. 9, was assigned to Lam Research Corp. (Fremont, Calif.).
"Automated showerhead tilt adjustment" was invented by Sam Jafarian Tehrani (King City, Ore.), Bryan Anthony Cmelak (Tigard, Ore.), Jacob Lee Hiester (Newberg, Ore.), Bin Luo (Beaverton, Ore.) and John Wiltse (Lake Oswego, Ore.).
According to the abstract* released by the U.S. Patent & Trademark Office: "In some examples, an automated tilting system is provided for adjusting an orientation of a component in a substrate processing chamber. The automated tilting system comprises at least one tilt adjustment motor arranged to cooperate with the component and be connected to a portion of the component by a...