US Patent Issued to LAM RESEARCH on Sept. 23 for "Systems and methods for autonomous process control and optimization of semiconductor equipment using light interferometry and reflectometry" (California Inventor)

ALEXANDRIA, Va., Sept. 23 -- United States Patent no. 12,424,470, issued on Sept. 23, was assigned to LAM RESEARCH Corp. (Fremont, Calif.).

"Systems and methods for autonomous process control and optimization of semiconductor equipment using light interferometry and reflectometry" was invented by Hossein Sadeghi (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "At least one laser sensor and a controller are embedded into a substrate processing system communicating with a remote big data and machine learning server receiving/sending data from/to a fleet of substrate processing systems for autonomous process control and optimization. The laser sensor is arranged proximate to a region of the subs...