US Patent Issued to Lam Research on Sept. 23 for "RF pulsing within pulsing for semiconductor RF plasma processing" (California Inventors)

ALEXANDRIA, Va., Sept. 23 -- United States Patent no. 12,424,410, issued on Sept. 23, was assigned to Lam Research Corp. (Fremont, Calif.).

"RF pulsing within pulsing for semiconductor RF plasma processing" was invented by Maolin Long (Santa Clara, Calif.), Yuhou Wang (Fremont, Calif.), Ying Wu (Livermore, Calif.) and Alex Paterson (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A system and method for generating a radio frequency (RF) waveform are described. The method includes defining a train of on-off pulses separated by an off state having no on-off pulses. The method further includes applying a multi-level pulse waveform that adjusts a magnitude of each of the on-off pulses to generate...