US Patent Issued to Lam Research on Sept. 23 for "Multi-station semiconductor processing with independently adjustable pedestals" (Oregon Inventors)

ALEXANDRIA, Va., Sept. 23 -- United States Patent no. 12,421,602, issued on Sept. 23, was assigned to Lam Research Corp. (Fremont, Calif.).

"Multi-station semiconductor processing with independently adjustable pedestals" was invented by Frank Loren Pasquale (Tigard, Ore.), Jennifer Leigh Petraglia (Portland, Ore.), Dinesh Baskar (Portland, Ore.) and Adrien LaVoie (Newberg, Ore.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Methods and apparatuses for depositing material onto substrates in a multi-station deposition apparatus having a first station and a second station are provided. One method may include providing a first substrate onto a first pedestal of the first station, providing a second substrate ont...