ALEXANDRIA, Va., Oct. 8 -- United States Patent no. 12,435,965, issued on Oct. 7, was assigned to Lam Research Corp. (Fremont, Calif.).
"Wafer state detection" was invented by Noah Elliot Baker (West Linn, Ore.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Various embodiments herein relate to apparatuses and methods for wafer state detection. In some embodiments, an apparatus for wafer state detection is provided, the apparatus comprising: an RF blocking filter; a DC blocking filter; and a controller coupled to a plurality of electrodes associated with an electrostatic chuck (ESC) via the RF blocking filter and the DC blocking filter, wherein the controller is configured to: cause an input signal to be inje...