ALEXANDRIA, Va., Oct. 8 -- United States Patent no. 12,437,966, issued on Oct. 7, was assigned to Lam Research Corp. (Fremont, Calif.).
"Systems and methods for reverse pulsing" was invented by Maolin Long (Santa Clara, Calif.), Zhongkui Tan (Fremont, Calif.), Ying Wu (Livermore, Calif.), Qian Fu (Pleasanton, Calif.), Alex Paterson (San Jose, Calif.) and John Drewery (San Jose, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Systems and methods for reverse pulsing are described. One of the methods includes receiving a digital signal having a first state and a second state. The method further includes generating a transformer coupled plasma (TCP) radio frequency (RF) pulsed signal having a high state wh...