US Patent Issued to LAM RESEARCH on Oct. 7 for "Solenoid bank with standby solenoid valves for controlling pneumatic valves of a substrate processing system" (Indian Inventors)

ALEXANDRIA, Va., Oct. 8 -- United States Patent no. 12,437,974, issued on Oct. 7, was assigned to LAM RESEARCH Corp. (Fremont, Calif.).

"Solenoid bank with standby solenoid valves for controlling pneumatic valves of a substrate processing system" was invented by Swajeeth Pilot Panchangam (Bangalore, India), Vinayakaraddy Gulabal (Yadgir, India), Yeshwanth Saghi (Bangalore, India) and Keerthi Gowdaru (Bengaluru, India).

According to the abstract* released by the U.S. Patent & Trademark Office: "A fluid control system for a substrate processing system includes (M+N) inlets configured to fluidly connect to (M) solenoid valves and (N) standby solenoid valves, respectively, where (M) and (N) are integers greater than zero. (M) outputs are conf...