US Patent Issued to Lam Research on Oct. 7 for "Removable showerhead faceplate for semiconductor processing tools" (American, Indian Inventors)

ALEXANDRIA, Va., Oct. 8 -- United States Patent no. 12,435,418, issued on Oct. 7, was assigned to Lam Research Corp. (Fremont, Calif.).

"Removable showerhead faceplate for semiconductor processing tools" was invented by Manjesh Shankarnarayana (Bangalore, India), Bin Luo (Beaverton, Ore.) and Eric H. Lenz (Livermore, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Showerheads for semiconductor processing operations are disclosed that have removable faceplates and various features that provide additional benefit in the context of removable faceplates."

The patent was filed on June 4, 2021, under Application No. 18/000,635.

*For further information, including images, charts and tables, please visit: ht...