US Patent Issued to Lam Research on Oct. 7 for "High density, modulus, and hardness amorphous carbon films at low pressure" (Oregon, California Inventors)

ALEXANDRIA, Va., Oct. 8 -- United States Patent no. 12,435,412, issued on Oct. 7, was assigned to Lam Research Corp. (Fremont, Calif.).

"High density, modulus, and hardness amorphous carbon films at low pressure" was invented by Matthew Scott Weimer (Portland, Ore.), Ragesh Puthenkovilakam (Portland, Ore.), Gordon Alex Macdonald (Sherwood, Ore.), Shaoqing Zhang (Fremont, Calif.), Shih-Ked Lee (Fremont, Calif.), Jun Xue (Fremont, Calif.), Samantha S. H. Tan (Newark, Calif.), Xizhu Zhao (San Jose, Calif.), Mary Anne Manumpil (Fremont, Calif.), Eric A. Hudson (Berkeley, Calif.) and Chin-Jui Hsu (Portland, Ore.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Provided herein are methods and related apparatus for d...