US Patent Issued to Lam Research on Oct. 14 for "Electrostatic chuck heater resistance measurement to approximate temperature" (California Inventors)

ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,444,570, issued on Oct. 14, was assigned to Lam Research Corp. (Fremont, Calif.).

"Electrostatic chuck heater resistance measurement to approximate temperature" was invented by Changyou Jing (Livermore, Calif.), Oleksandr Mikhnenko (San Diego) and Christopher Kimball (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A controller including a voltage sensor coupled to a heater trace integrated in an electrostatic chuck, the voltage sensor configured to sense a voltage difference across the heater trace, wherein the heater trace is associated with a heater zone. The controller including a current sensor coupled to the heater trace and config...