US Patent Issued to Lam Research on Nov. 4 for "Heater design solutions for chemical delivery systems" (California Inventors)

ALEXANDRIA, Va., Nov. 6 -- United States Patent no. 12,460,294, issued on Nov. 4, was assigned to Lam Research Corp. (Fremont, Calif.).

"Heater design solutions for chemical delivery systems" was invented by Davinder Sharma (San Jose, Calif.), Christopher J. Rau (Milpitas, Calif.), Panya Wongsenakhum (Fremont, Calif.), Charlie Damaso (San Jose, Calif.) and Marvin Clayton Brees (Boulder Creek, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A semiconductor substrate processing apparatus includes a chemical isolation chamber for processing a semiconductor substrate, a chemical delivery module, and a control module. The chemical delivery module is in fluid communication with the chamber and includes a can...