US Patent Issued to Lam Research on Nov. 25 for "Process module chamber providing symmetric RF return path" (Oregon, California, Florida Inventors)

ALEXANDRIA, Va., Nov. 25 -- United States Patent no. 12,482,636, issued on Nov. 25, was assigned to Lam Research Corp. (Fremont, Calif.).

"Process module chamber providing symmetric RF return path" was invented by Sam Jafarian Tehrani (Fremont, Calif.), Karl Frederick Leeser (West Linn, Ore.), David French (Fort Myers, Fla.) and John Michael Wiltse (Lake Oswego, Ore.).

According to the abstract* released by the U.S. Patent & Trademark Office: "An apparatus including a multi-station processing chamber with a top plate and a bottom portion encloses stations each including a pedestal assembly. A spindle centrally located between the stations is configured to rotate about a central axis, and is electrically connected to the bottom portion. An...