US Patent Issued to Lam Research on Nov. 25 for "Dynamic sheath control with edge ring lift" (Oregon, California Inventors)

ALEXANDRIA, Va., Nov. 25 -- United States Patent no. 12,480,208, issued on Nov. 25, was assigned to Lam Research Corp. (Fremont, Calif.).

"Dynamic sheath control with edge ring lift" was invented by Jacob Lee Hiester (Newberg, Ore.), Richard M. Blank (San Jose, Calif.), Curtis W. Bailey (West Linn, Ore.) and Michael J. Janicki (Portland, Ore.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A pedestal assembly including a pedestal for supporting a substrate. A central shaft positions the pedestal at a height during operation. A ring is placed along a periphery of the pedestal. A ring adjuster subassembly includes an adjuster flange disposed around a middle section of the central shaft. The subassembly includes...