US Patent Issued to Lam Research on Nov. 18 for "Radiofrequency signal filter arrangement for plasma processing system" (California Inventors)

ALEXANDRIA, Va., Nov. 18 -- United States Patent no. 12,476,082, issued on Nov. 18, was assigned to Lam Research Corp. (Fremont, Calif.).

"Radiofrequency signal filter arrangement for plasma processing system" was invented by Alexei Marakhtanov (Albany, Calif.), Felix Kozakevich (Sunnyvale, Calif.), Bing Ji (Pleasanton, Calif.), Ranadeep Bhowmick (San Jose, Calif.) and John Holland (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A tunable edge sheath (TES) system includes a coupling ring configured to couple to a bottom surface of an edge ring that surrounds a wafer support area within a plasma processing chamber. The TES system includes an annular-shaped electrode embedded within the coupli...