ALEXANDRIA, Va., Nov. 18 -- United States Patent no. 12,473,638, issued on Nov. 18, was assigned to Lam Research Corp. (Fremont, Calif.).
"Liquid precursor vaporizer" was invented by Eric Russell Madsen (Sherwood, Ore.), Seyedalireza Torbatisarraf (San Jose, Calif.), Yu Jiang (San Jose, Calif.) and Narudha Tai Benyuhmin (Santa Clara, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "In some examples, a liquid precursor vaporizer comprises an inlet, an outlet, and a first vaporizer core, the first vaporizer core including a plurality of nested cells defining a plurality of tortuous paths through which a liquid precursor can pass in a path between the inlet and the outlet of the liquid precursor vaporizer....