ALEXANDRIA, Va., June 10 -- United States Patent no. D1,073,758, issued on May 6, was assigned to LAM RESEARCH Corp. (Fremont, Calif.).
"Baffle for substrate processing system" was invented by Karthik Adappa Sathish (Bangalore, India), Cody Barnett (Beaverton, Ore.), Mitali Mrigendra Basargi (Karad, India) and Ravi Kumar (Beaverton, Ore.).
The patent was filed on Oct. 13, 2022, under Application No. D/856,399.
*For further information, including images, charts and tables, please visit: http://patft.uspto.gov/netacgi/nph-Parser?Sect1=PTO2&Sect2=HITOFF&p=1&u=%2Fnetahtml%2FPTO%2Fsearch-bool.html&r=1&f=G&l=50&co1=AND&d=PTXT&s1=D1073758&OS=D1073758&RS=D1073758
Disclaimer: Curated by HT Syndication....