ALEXANDRIA, Va., June 17 -- United States Patent no. 12,315,705, issued on May 27, was assigned to Lam Research Corp. (Fremont, Calif.).
"Distortion of pulses for wafer biasing" was invented by Karl Frederick Leeser (West Linn, Ore.) and John Holland (San Jose, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Various embodiments herein relate to apparatuses and methods for distortion of pulses for wafer biasing. In some embodiments, a method is provided, the method comprising: causing a distorted pulse to be applied to an electrode of a pedestal such that the distorted pulse at least partially compensates for attenuation between the pedestal and the substrate, and such that a waveform resulting from the...