US Patent Issued to Lam Research on May 20 for "Rapid tuning of critical dimension non-uniformity by modulating temperature transients of multi-zone substrate supports" (Oregon Inventors)

ALEXANDRIA, Va., June 16 -- United States Patent no. 12,308,264, issued on May 20, was assigned to Lam Research Corp. (Fremont, Calif.).

"Rapid tuning of critical dimension non-uniformity by modulating temperature transients of multi-zone substrate supports" was invented by Ravi Kumar (Beaverton, Ore.), Pulkit Agarwal (Beaverton, Ore.), Adrien Lavoie (Newberg, Ore.), Ramesh Chandrasekharan (Lake Oswego, Ore.) and Michael Philip Roberts (Tigard, Ore.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate processing system includes a processing chamber, a substrate support including a plurality of heater zones arranged in the processing chamber, a gas delivery system configured to deliver process gases to ...