US Patent Issued to Lam Research on May 13 for "Method and system for automated frequency tuning of radiofrequency (RF) signal generator for multi-level RF power pulsing" (Canadian, American Inventors)

ALEXANDRIA, Va., June 12 -- United States Patent no. 12,300,463, issued on May 13, was assigned to Lam Research Corp. (Fremont, Calif.).

"Method and system for automated frequency tuning of radiofrequency (RF) signal generator for multi-level RF power pulsing" was invented by Mathew Evans (Ontario, Canada), Ying Wu (Livermore, Calif.) and Alexander Paterson (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A two-dimensional frequency search grid is defined by a first coordinate axis representing an operating frequency setpoint of an RF signal generator in a first operational state and a second coordinate axis representing an operating frequency setpoint of the RF signal generator in a second o...