US Patent Issued to Lam Research on March 25 for "Protection system for switches in direct drive circuits of substrate processing systems" (California Inventors)

ALEXANDRIA, Va., March 26 -- United States Patent no. 12,261,029, issued on March 25, was assigned to Lam Research Corp. (Fremont, Calif.).

"Protection system for switches in direct drive circuits of substrate processing systems" was invented by Maolin Long (Santa Clara, Calif.), Yuhou Wang (Fremont, Calif.), Michael John Martin (Union City, Calif.) and Alexander Miller Paterson (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A direct drive system for providing RF power to a component of a substrate processing system includes a direct drive circuit including a switch and configured to supply RF power to the component. A switch protection module is configured to monitor a load current and a l...