US Patent Issued to Lam Research on March 25 for "Plenum assemblies for cooling transformer coupled plasma windows" (California Inventor)

ALEXANDRIA, Va., March 26 -- United States Patent no. 12,261,018, issued on March 25, was assigned to Lam Research Corp. (Fremont, Calif.).

"Plenum assemblies for cooling transformer coupled plasma windows" was invented by Hanry Issavi (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A plenum for a dielectric window of a substrate processing system includes a first inlet port, a second inlet port, and a body. The body includes: a first recessed area configured to hold a first coil; a second recessed area configured to hold a second coil; a third recessed area configured to oppose a first area of the dielectric window, receive a first coolant from the first inlet port, and direct the first coo...