US Patent Issued to Lam Research on March 18 for "Process control for ion energy delivery using multiple generators and phase control" (California Inventors)

ALEXANDRIA, Va., March 19 -- United States Patent no. 12,255,052, issued on March 18, was assigned to Lam Research Corp. (Fremont, Calif.).

"Process control for ion energy delivery using multiple generators and phase control" was invented by Ranadeep Bhowmick (San Jose, Calif.), Felix Kozakevich (Sunnyvale, Calif.), Alexei Marakhtanov (Albany, Calif.), John Holland (Fremont, Calif.) and Eric Hudson (Fremont, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method for applying RF power in a plasma process chamber is provided, including: generating a first RF signal; generating a second RF signal; generating a third RF signal; wherein the first, second, and third RF signals are generated at different fr...