US Patent Issued to Lam Research on June 3 for "Systems and methods for tuning a MHz RF generator within a cycle of operation of a kHz RF generator" (California, Ohio Inventors)

ALEXANDRIA, Va., June 4 -- United States Patent no. 12,322,572, issued on June 3, was assigned to Lam Research Corp. (Fremont, Calif.).

"Systems and methods for tuning a MHz RF generator within a cycle of operation of a kHz RF generator" was invented by Arthur M. Howald (Livermore, Calif.) and John C. Valcore Jr. (Worthington, Ohio).

According to the abstract* released by the U.S. Patent & Trademark Office: "Systems and methods for tuning a megahertz radio frequency (RF) generator within a cycle of operation of a kilohertz (kHz) RF generator are described. In one of the methods, a predetermined periodic waveform is provided to a processor. The processor uses a computer-based model to determine plurality of frequency parameters for the pre...