US Patent Issued to LAM RESEARCH on June 3 for "Mechanical indexer for multi-station process module" (California, Oregon Inventors)

ALEXANDRIA, Va., June 4 -- United States Patent no. 12,322,641, issued on June 3, was assigned to LAM RESEARCH Corp. (Fremont, Calif.).

"Mechanical indexer for multi-station process module" was invented by Michael Nordin (San Jose, Calif.), Karl Frederick Leeser (West Linn, Ore.), Richard Blank (San Jose, Calif.), Robert Sculac (Lake Oswego, Ore.) and Damien Martin Slevin (Salem, Ore.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A process module for a substrate processing tool includes a plurality of processing stations each configured to perform a process on a substrate and a mechanical indexer arranged within the process module. The mechanical indexer includes a plurality of end effectors including at le...