US Patent Issued to Lam Research on June 3 for "Anomalous plasma event detection and mitigation in semiconductor processing" (Oregon, Washington Inventors)

ALEXANDRIA, Va., June 4 -- United States Patent no. 12,322,582, issued on June 3, was assigned to Lam Research Corp. (Fremont, Calif.).

"Anomalous plasma event detection and mitigation in semiconductor processing" was invented by Sunil Kapoor (Vancouver, Wash.), Karl Frederick Leeser (West Linn, Ore.), Noah Baker (West Linn, Ore.), Liang Meng (Sherwood, Ore.) and Yukinori Sakiyama (West Linn, Ore.).

According to the abstract* released by the U.S. Patent & Trademark Office: "In particular embodiments, anomalous plasma events, which may include formation of an electric arc in a semiconductor processing chamber, may be detected and mitigated. In certain embodiments, a method may include detecting an optical signal emitted by a plasma, conver...