US Patent Issued to LAM RESEARCH on June 17 for "Systems and methods for homogenous intermixing of precursors in alloy atomic layer deposition" (California, Oregon Inventors)

ALEXANDRIA, Va., June 19 -- United States Patent no. 12,331,396, issued on June 17, was assigned to LAM RESEARCH Corp. (Fremont, Calif.).

"Systems and methods for homogenous intermixing of precursors in alloy atomic layer deposition" was invented by Ilanit Fisher (San Jose, Calif.), Raashina Humayun (Los Altos, Calif.), Michal Danek (Cupertino, Calif.), Patrick Van Cleemput (West Linn, Ore.) and Shruti Thombare (Sunnyvale, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A showerhead includes a plurality of plenums and a plurality of through holes positioned in the plurality of plenums. The plenums are stacked in a sequential order in an axial direction perpendicular to a semiconductor substrate. The pl...