US Patent Issued to Lam Research on July 8 for "Systems and methods for optimizing power delivery to an electrode of a plasma chamber" (California Inventors)

ALEXANDRIA, Va., July 9 -- United States Patent no. 12,354,840, issued on July 8, was assigned to Lam Research Corp. (Fremont, Calif.).

"Systems and methods for optimizing power delivery to an electrode of a plasma chamber" was invented by Ranadeep Bhowmick (San Jose, Calif.), John Holland (San Jose, Calif.), Felix Leib Kozakevich (Sunnyvale, Calif.), Bing Ji (Pleasanton, Calif.) and Alexei Marakhtanov (Albany, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method for optimizing delivery of power to a plasma chamber is described. The method includes dividing each cycle of a low frequency (LF) radio frequency generator (RFG) into multiple time intervals. During each of the time intervals, a frequency...