ALEXANDRIA, Va., July 9 -- United States Patent no. 12,354,895, issued on July 8, was assigned to Lam Research Corp. (Fremont, Calif.).
"Encapsulated RFID in consumable chamber parts" was invented by Gordon Peng (San Jose, Calif.), Yu Jiang (San Jose, Calif.), David Celli (Pleasanton, Calif.) and Steve Askin (Tracy, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A consumable part and methods for tracking the consumable part includes embedding a radio frequency tag within a pocket created on a side of the consumable part that faces away from a process region defined within a process chamber of the processing tool and covering an opening of the pocket using a plug. The plug is laser fused along an inter...