ALEXANDRIA, Va., July 23 -- United States Patent no. 12,368,029, issued on July 22, was assigned to Lam Research Corp. (Fremont, Calif.).
"Lamellar ceramic structure" was invented by Joel Philip Hollingsworth (Portland, Ore.), Karl Frederick Leeser (West Linn, Ore.) and Ramkishan Rao Lingampalli (Danville, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "In some examples, a substrate support assembly comprises a monolithic ceramic body, a heater element disposed within the monolithic ceramic body, and an RF antenna disposed within the monolithic ceramic body. One or more power lines supplies the heater element and the RF antenna. A lamellar structure is formed or included within the monolithic ceramic b...