US Patent Issued to LAM RESEARCH on July 22 for "Edge seal for lower electrode assembly" (California Inventors)

ALEXANDRIA, Va., July 23 -- United States Patent no. 12,368,025, issued on July 22, was assigned to LAM RESEARCH Corp. (Fremont, Calif.).

"Edge seal for lower electrode assembly" was invented by David Schaefer (Fremont, Calif.), Ambarish Chhatre (San Jose, Calif.), Keith William Gaff (Fremont, Calif.), Sung Je Kim (Pleasanton, Calif.) and Brooke Mesler Lai (Fremont, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "An edge seal for sealing an outer surface of a lower electrode assembly configured to support a semiconductor substrate in a plasma processing chamber, the lower electrode assembly including an annular groove defined between a lower member and an upper member of the lower electrode assembly. T...