US Patent Issued to Lam Research on July 15 for "Systems and methods for controlling a plasma sheath characteristic" (California Inventors)

ALEXANDRIA, Va., July 16 -- United States Patent no. 12,362,159, issued on July 15, was assigned to Lam Research Corp. (Fremont, Calif.).

"Systems and methods for controlling a plasma sheath characteristic" was invented by Alexei M. Marakhtanov (Albany, Calif.), James Eugene Caron (Tracy, Calif.), John Patrick Holland (San Jose, Calif.), Felix Leib Kozakevich (Sunnyvale, Calif.), Ranadeep Bhowmick (San Jose, Calif.) and Bing Ji (Pleasanton, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Systems and methods for controlling a plasma sheath characteristic are described. One of the methods includes determining a first value of the plasma sheath characteristic of a plasma sheath formed within a plasma cham...