ALEXANDRIA, Va., July 16 -- United States Patent no. 12,362,153, issued on July 15, was assigned to LAM RESEARCH Corp. (Fremont, Calif.).
"Pedestal setup using camera wafer" was invented by Prasanna Kulkarni (Tigard, Ore.), Rachel E. Batzer (Tigard, Ore.), Ted Tan (West Linn, Ore.), Vivekanandan Krishnaswamy (Bangalore, India), Boonyarit Woonprasert (Tigard, Ore.) and Shawn Fiedler (Tigard, Ore.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method comprises arranging an apparatus on a top surface of a pedestal in a processing chamber. The apparatus comprises an annular member, N supporting members, and N pins, where N is an integer greater than two. The N supporting members support the annular member in a...