US Patent Issued to Lam Research on July 15 for "Large spot spectral sensing to control spatial setpoints" (Oregon, California Inventors)

ALEXANDRIA, Va., July 16 -- United States Patent no. 12,360,510, issued on July 15, was assigned to Lam Research Corp. (Fremont, Calif.).

"Large spot spectral sensing to control spatial setpoints" was invented by Ye Feng (Portland, Ore.), Seonkyung Lee (Santa Clara, Calif.), Rajan Arora (Portland, Ore.) and Jorge Luque (Redwood City, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A large beam spot spectral reflectometer system for measuring a substrate is provided. Hardware components for collecting in situ large beam spot optical signals is disclosed. Machine learning models for denoising large beam spot optical signals are disclosed. Machine learning models for interpreting in situ optical data and ...