US Patent Issued to LAM RESEARCH on July 15 for "Foreline assembly for quad station process module" (Oregon Inventors)

ALEXANDRIA, Va., July 16 -- United States Patent no. 12,362,206, issued on July 15, was assigned to LAM RESEARCH Corp. (Fremont, Calif.).

"Foreline assembly for quad station process module" was invented by Miguel Benjamin Vasquez (Portland, Ore.) and Emile Draper (Molalla, Ore.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A foreline assembly for a quad station process module (QSM) is provided. In some examples, a foreline assembly comprises four inlets each connectable to a chamber port of a process module of the QSM and an outlet connectable directly or indirectly to a vacuum source. A first foreline bifurcation is disposed proximate the outlet of the foreline assembly. Two second bifurcations are each di...