ALEXANDRIA, Va., Jan. 28 -- United States Patent no. 12,535,454, issued on Jan. 27, was assigned to Lam Research Corp. (Fremont, Calif.).
"Leveling compound control" was invented by Matthew A. Rigsby (Tualatin, Ore.), Tighe A. Spurlin (Portland, Ore.) and Jonathan D. Reid (Sherwood, Ore.).
According to the abstract* released by the U.S. Patent & Trademark Office: "An apparatus and method of adjusting a plating solution are described. Suppressor is added to the plating solution until a comparison to reference data of an RDE potential taken at a first time during a constant current experiment indicates a threshold suppressor concentration is present. The amount of suppressor added to reach the threshold suppressor concentration is used to d...