US Patent Issued to LAM RESEARCH on Jan. 27 for "Integrated hardware-software computer vision system for autonomous control and inspection of substrate processing systems" (California, Virginia Inventors)

ALEXANDRIA, Va., Jan. 28 -- United States Patent no. 12,537,178, issued on Jan. 27, was assigned to LAM RESEARCH Corp. (Fremont, Calif.).

"Integrated hardware-software computer vision system for autonomous control and inspection of substrate processing systems" was invented by Hossein Sadeghi (San Jose, Calif.), Scott Baldwin (Reston, Va.) and Andrew D. Bailey III (Milpitas, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate processing system comprises an edge computing device including processor that executes instructions stored in a memory to process an image or video captured by camera(s) of at least one of a substrate and a component of the substrate processing system. The component is ass...