US Patent Issued to Lam Research on Jan. 27 for "Frontside and backside pressure monitoring for substrate movement prevention" (California, Oregon Inventors)

ALEXANDRIA, Va., Jan. 28 -- United States Patent no. 12,538,747, issued on Jan. 27, was assigned to Lam Research Corp. (Fremont, Calif.).

"Frontside and backside pressure monitoring for substrate movement prevention" was invented by Songqi Gao (Sunnyvale, Calif.), Goon Heng Wong (Tualatin, Ore.) and Jack Chen (San Francisco).

According to the abstract* released by the U.S. Patent & Trademark Office: "A pressure control system includes a first sensor, a second sensor, an evacuation valve and a controller. The first sensor is configured to detect a frontside pressure within a processing chamber. The frontside pressure is indicative of a downforce on a substrate disposed on a substrate support within the processing chamber. The second sensor...