ALEXANDRIA, Va., Jan. 20 -- United States Patent no. 12,530,021, issued on Jan. 20, was assigned to Lam Research Corp. (Fremont, Calif.).
"Performance predictors for semiconductor-manufacturing processes" was invented by Kapil Umesh Sawlani (Sunnyvale, Calif.), Michal Danek (Cupertino, Calif.), Ravi Vellanki (San Jose, Calif.), Sanjay Gopinath (Fremont, Calif.), David G. Cohen (San Jose, Calif.), Sassan Roham (San Ramon, Calif.), Saravanapriyan Sriraman (Fremont, Calif.), Benjamin Allen Haskell (Pleasanton, Calif.) and Lee J. Brogan (Newberg, Ore.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Methods, systems, and computer programs are presented for predicting the performance of semiconductor manufacturing ...