US Patent Issued to Lam Research on Jan. 20 for "Automated feedforward and feedback sequence for patterning CD control" (Oregon Inventors)

ALEXANDRIA, Va., Jan. 20 -- United States Patent no. 12,531,220, issued on Jan. 20, was assigned to Lam Research Corp. (Fremont, Calif.).

"Automated feedforward and feedback sequence for patterning CD control" was invented by Ravi Kumar (Beaverton, Ore.), Pulkit Agarwal (Beaverton, Ore.), Michael Philip Roberts (Tigard, Ore.), Ramesh Chandrasekharan (Portland, Ore.) and Adrien Lavoie (Newberg, Ore.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method for performing a feedback sequence for patterning CD control. The method including performing a series of process steps on a wafer to obtain a plurality of features, wherein a process step is performed under a process condition. The method including measuring...