US Patent Issued to Lam Research on Jan. 13 for "RF magnetic field sensor for harmonic measurements and uniformity control" (California Inventor)

ALEXANDRIA, Va., Jan. 13 -- United States Patent no. 12,525,435, issued on Jan. 13, was assigned to Lam Research Corp. (Fremont, Calif.).

"RF magnetic field sensor for harmonic measurements and uniformity control" was invented by Felix Leib Kozakevich (Sunnyvale, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A magnetic field sensor for measuring magnetic field of a current applied to a lower electrode defined within a plasma chamber includes a conductor element disposed along a length of a tubular housing. A plurality of slots is defined on one side of the tubular housing to expose the conductor element."

The patent was filed on March 19, 2021, under Application No. 17/912,825.

*For further informa...