US Patent Issued to Lam Research on Feb. 3 for "Minimizing reflected power in a tunable edge sheath system" (California Inventors)

ALEXANDRIA, Va., Feb. 3 -- United States Patent no. 12,542,257, issued on Feb. 3, was assigned to Lam Research Corp. (Fremont, Calif.).

"Minimizing reflected power in a tunable edge sheath system" was invented by David Hopkins (Newark, Calif.), Bradford Lyndaker (San Ramon, Calif.), Alexei Marakhtanov (Albany, Calif.) and Felix Kozakevich (Sunnyvale, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method for controlling reflected power in a plasma processing system is provided, including: applying RF power from a first generator to an ESC; applying RF power from a second generator to an edge electrode that surrounds the ESC and is disposed below an edge ring that surrounds the ESC, the RF power from ...