US Patent Issued to LAM RESEARCH on Feb. 3 for "Grouping features of showerheads in substrate processing systems" (Oregon Inventors)

ALEXANDRIA, Va., Feb. 3 -- United States Patent no. 12,539,569, issued on Feb. 3, was assigned to LAM RESEARCH Corp. (Fremont, Calif.).

"Grouping features of showerheads in substrate processing systems" was invented by Rohit Ode (Portland, Ore.), Eugene Smargiassi (Tualatin, Ore.), Jeffrey Womack (Lake Oswego, Ore.), Nick Ray Linebarger Jr. (Beaverton, Ore.), Damodar Rajaram Shanbhag (Beaverton, Ore.) and Eric Madsen (Sherwood, Ore.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method includes selecting first features to be machined within a first tolerance range, and second features, which are located at least a predetermined distance apart, to be machined within a second tolerance range of a specified d...