US Patent Issued to Lam Research on Feb. 25 for "System, method, and user interface for edge ring wear compensation" (California Inventors)

ALEXANDRIA, Va., Feb. 26 -- United States Patent no. 12,237,203, issued on Feb. 25, was assigned to Lam Research Corp. (Fremont, Calif.).

"System, method, and user interface for edge ring wear compensation" was invented by Tom A. Kamp (San Jose, Calif.) and Carlos Leal-Verdugo (Richmond, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method for adjusting a height of an edge ring arranged around an outer portion of a substrate support includes receiving at least one input indicative of one or more erosion rates of the edge ring. The at least one input includes a plurality of erosion rates for respective usage periods of a substrate processing system. The method further includes determining at least o...