US Patent Issued to Lam Research on Feb. 25 for "Electrostatic chucks with coolant gas zones and corresponding groove and monopolar electrostatic clamping electrode patterns" (California Inventors)

ALEXANDRIA, Va., Feb. 26 -- United States Patent no. 12,237,201, issued on Feb. 25, was assigned to Lam Research Corp. (Fremont, Calif.).

"Electrostatic chucks with coolant gas zones and corresponding groove and monopolar electrostatic clamping electrode patterns" was invented by Alexander Matyushkin (San Jose, Calif.), Keith Comendant (Fremont, Calif.) and John Patrick Holland (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "An electrostatic chuck for a substrate processing system is provided and includes a baseplate, an intermediate layer disposed on the baseplate, and a top plate. The top plate is bonded to the baseplate via the intermediate layer and is configured to electrostatically cla...