ALEXANDRIA, Va., Feb. 19 -- United States Patent no. 12,230,482, issued on Feb. 18, was assigned to LAM RESEARCH Corp. (Fremont, Calif.).
"Moveable edge ring designs" was invented by Hiran Rajitha Rathnasinghe (Fremont, Calif.) and Jon Mcchesney (Fremont, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "An edge ring is configured to be raised and lowered relative to a substrate support, via one or more lift pins, in a substrate processing system. The edge ring is further configured to interface with a guide feature extending upward from a bottom ring and/or a middle ring of the substrate support during tuning of the edge ring. The edge ring includes an upper surface, an annular inner diameter, an annula...