ALEXANDRIA, Va., Feb. 11 -- United States Patent no. 12,544,809, issued on Feb. 10, was assigned to Lam Research Corp. (Fremont, Calif.).
"Conditioning chamber component" was invented by Amir A. Yasseri (San Jose, Calif.), Hong Shih (Cupertino, Calif.), John Daugherty (Fremont, Calif.), Duane Outka (Fremont, Calif.), Lin Xu (Fremont, Calif.), Armen Avoyan (Oakland, Calif.), Cliff La Croix (Gardnerville, Nev.) and Girish M Hundi (Lathrop, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method for conditioning a component of a wafer processing chamber is provided. The component is placed in an ultrasonic conditioning solution in an ultrasonic solution tank. Ultrasonic energy is applied through the ultr...